HomeCompanyServicesProductsAlliancesNewsCareersGet in Touch
E Beam

Features

The IDS 10000cs provides unmatched performance capabilities

 It is the only system to offer unassisted wafer-levelprobing via the Motorized Wafer Stage.

 Near-the-line automated e-beam wafer probe for characterization

 Automated wafer die-to-die step and measure capability for unattended operation, higher throughput and lower cost of operation

 Fast, non-contact, non-loading probe using e-beam techniques to measure thousands of waveforms a day

 Seventh generation high resolution e-beam column for imaging and accurate probe placement to ICs fabricated with 0.18 micron technology

 Unmatched performance with bandwidth of 12GHz, accuracy of +/- 40ps and timing resolution of 2.5ps

 50 megahertz x16 Channels of digital I/O (scalable to 64 channels)

The result is faster IC production cycles and high yield improvements for meeting rigorous time-to-market demands

The IDS 10000cs is ideally suited to IC manufacturers who invest in electrical analysis for process ramp. Initial electrical analysis can save precious time-to-market demands when dealing with advanced semiconductor products

 IDS 10000 Specifications
OPTICS
Electron Optics 3rd Generation TFE (Zr-O/W Schottky Effect)
Beam Current >14nA in High Current Mode

>5nA in High Resolution Mode
Beam Energy 700-1200eV
Pulse Width 40ps to 1ms
Vacuum System oil-free, 3 stage differential pumping
Gun Pressure 10-9 Torr
   
   
WAVEFORM ACQUISITION  
Voltage Display 20mV/div to 10V/div
Timebase Display 50ps/div to 100ms/div
Bandwidth 12GHz
Jitter <25ps RMS
Triggering Standard, Clock Sync
Timebase Resolution 2.5ps
Timebase Accuracy +/-40ps
   
   
CHAMBER  
Device Stage Travel 50mm x 50mm
Stage Resolution 0.1mm
   
   
WAFER STAGE  
X and Y Axis Travel +/-100mm at 20mm/sec
Z Axis Travel 10mm at 2mm/sec
X, Y and Z Resolution 1mm
Rotation +/-8 degrees
Wafer Types 125mm, 150mm, 200mm
Temperature Range -40°C to +125°C
   
   
 CONTROL  
Workstation Sun
Workstation
Color display,
CD/DVD Drive
Interfaces Ethernet, RS-232, SCSI, PCI
   
   
CHAMBER  
Device Stage Travel 50mm x 50mm
Stage Resolution 0.1mm
   
   
SOFTWARE  
Operating System Solaris
Database Support Knights, Cadence, Mentor Graphics
layout3 Formats GSDll, CIF
Netlist Formats Spice, Tegas, Verilog, EDIF
Schematic Formats EDIF
   
   
OPTIONS  
Packaged Parts 768pin Load Module
512pin Load Module
Standard Wafer Probe
Motherboard

Compatible with all
standard IDS load
modules.

Software IFA, CircuitAnalyzer‚
BatchProbe‚ layout3Overlay
Probepoint Support IDS P2X and P3X compatible